| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heater structure that prevents damage caused by a difference in thermal expansion between dissimilar materials when graphite is covered with PBN and the like, and has excellent balance between rigidity and deformation tolerability. <P>SOLUTION: A heater 32 includes: a heater body 35, in which a filamentous heater element 33 composed of graphite forms a predetermined heater pattern between both terminals 34a and 34b; a PBN rib 37 that connects the heater elements with each other intermittently in an insulative fashion; and power feeding posts 38a and 38b that are connected with both terminals of the heat pattern, respectively. Since the heater allows deformation to some degree while having shape retention, ruptures and damages caused by a difference in thermal expansion coefficient between the graphite and the PBN rib can be prevented even when used under a high-temperature condition. In particular, when the heater is made to be a post type structure and self-supported by a post, the heater can prevent a heater body from being distorted by a self-weight and appropriately maintains the temperature distribution of a wafer. <P>COPYRIGHT: (C)2013,JPO&INPIT |
