发明名称 METHOD OF CUTTING WORKPIECE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of cutting a workpiece, which can reduce outbreaks of cracks in the workpiece. <P>SOLUTION: The method of cutting a workpiece uses a wire saw device S which includes a first main roller 5a; a second main roller 5b disposed with a predetermined distance from the first main roller 5a, and wire 3 stretched in a plurality of rows in a plane between these main rollers and including abrasive grains fixed to the surface thereof, and which transfers the wire 3 from the second main roller 5b, while supplying the wire 3 to the first main roller 5a. When starting cutting a workpiece 1, a first surface 1a is inclined in a direction, in which a first end part 21 of the first surface 1a of the workpiece 1 positioning on a first main roller 5a side of the workpiece 1 is separated upward from a virtual plane 12, relative to the virtual plane 12 which includes the plurality of rows of the wire 3 in a no-load condition, and a second end 22 of the first surface 1a of the workpiece 1 positioning on a second main roller 5b side of the workpiece 1 is firstly brought into contact with the wire 3 so as to cut the workpiece. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013094872(A) 申请公布日期 2013.05.20
申请号 JP20110238694 申请日期 2011.10.31
申请人 KYOCERA CORP 发明人 KAWAMURA SATOSHI;HAYAKAWA TOMOHIRO
分类号 B24B27/06;B28D5/04;H01L21/304 主分类号 B24B27/06
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