| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polycrystalline ceramic joined body having high strength, causing little deformation of a polycrystalline ceramic substrate, and hardly generating contamination even when being used as a member for a production apparatus of a semiconductor or a liquid crystal, and to provide a method for manufacturing the same. <P>SOLUTION: This polycrystalline ceramic joined body is formed by joining a first polycrystalline ceramic substrate containing Y<SB POS="POST">2</SB>O<SB POS="POST">3</SB>as a major phase with a second polycrystalline ceramic substrate containing Al<SB POS="POST">2</SB>O<SB POS="POST">3</SB>or Y<SB POS="POST">2</SB>O<SB POS="POST">3</SB>as a major phase through a joining layer, wherein the joining layer comprises a composite oxide containing at least three kinds of oxides selected from Y<SB POS="POST">2</SB>O<SB POS="POST">3</SB>, Al<SB POS="POST">2</SB>O<SB POS="POST">3</SB>, SiO<SB POS="POST">2</SB>and ZrO<SB POS="POST">2</SB>. <P>COPYRIGHT: (C)2013,JPO&INPIT |
