| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pellicle frame which uses composite material obtained by impregnating carbon fiber with resin, whose weight can be reduced, in which a bend caused by tension of a pellicle film or handling is small, which has high rigidity, and whose material cost and production cost are reduced. <P>SOLUTION: A pellicle frame 1 is a quadrangular frame body composed of long sides and short sides, and four corner parts of the pellicle frame are arcuate on both an inner wall side and an outer wall side. At predetermined places on a wall surface of each of the long sides and the short sides, a vent 2 for making air communicated between the inside and outside of the pellicle frame 1 and a recessed hole 3 to be used for handling are provided. In addition, at a lower end face where a mask adhesion layer is provided, a level difference 4 for the mask adhesion layer for forming the mask adhesion layer is provided. <P>COPYRIGHT: (C)2013,JPO&INPIT |
