| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a retainer for measurements and a measuring apparatus capable of accommodating to an inspection with high accuracy. <P>SOLUTION: The retainer for measurements according to one embodiment includes a package including a plurality of semiconductor chips, and a conduction part exposed from the side of the package and conducting with electrodes of the semiconductor chips; and retains an object to be measured. The retainer for the measurements includes: a support substrate provided with a through-hole at a position where the object to be measured is placed; a fixing part for fixing the object to be measured to the support substrate; and a probe part that is movably provided at least in a uniaxial direction with respect to the support substrate and comes into contact with the conduction part. <P>COPYRIGHT: (C)2013,JPO&INPIT |
