| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cutting device capable of restraining cutting liquid from dripping in an imaging range on a surface of a workpiece. <P>SOLUTION: The cutting device comprises: a chuck table 10 for holding a workpiece W; processing means having a cutting blade for cutting the workpiece W and a nozzle for supplying cutting liquid to the cutting blade; and imaging means 30 for imaging the surface of the workpiece W. The imaging means 30 comprises: a microscope 31 having an objective lens 31a opposed to the surface of the workpiece W held by the chuck table 10; a microscope box 31 covering a periphery of the microscope 31 and having a bottom part 32a on one part of which an imaging opening 32b is formed; and shutter means 33 for selectively opening/closing the imaging opening 32b during shielding and imaging. The bottom part 32a of the microscope box 32 is inclined to a horizontal plane, and the cutting liquid adhered to the bottom part 32a is introduced to a lower end 32d of the inclined bottom part 32a and is not remained on the bottom part 32a, so as to promote dripping. <P>COPYRIGHT: (C)2013,JPO&INPIT |
