| 摘要 |
PURPOSE: A hybrid plasma reactor is provided to effectively operate two plasma sources by using one power supply source. CONSTITUTION: A reactor body(11) has a plasma discharge space, a gas inlet, and a gas outlet. A hybrid plasma source(20) has plasma which is formed in the plasma discharge space, an induction antenna which is combined inductively, and a primary winding coil which is combined with plasma and a transformer and is wound around a magnetic core. An AC switching power source(32) supplies plasma generating power to the induction antenna and the primary winding coil. |
