发明名称 PROTECTIVE TREATMENT FOR POROUS MATERIALS
摘要 A method for treating a surface of a porous material in an environment is provided, comprising setting the temperature of the surface to a value T1 and setting the pressure of the environment to a value P1, contacting the surface with a fluid having a solidifying temperature at the pressure value P1 above the value T1 and having a vaporizing temperature at the pressure value P1 below 80° C., thereby solidifying the fluid in pores of the material, thereby sealing the pores, treating the surface, wherein the treatment is preferably an etching or a modification of the surface, and setting the temperature of the surface to a value T2 and setting the pressure of the environment to a value P2 in such a way as to vaporize the fluid.
申请公布号 US2013119014(A1) 申请公布日期 2013.05.16
申请号 US201213675442 申请日期 2012.11.13
申请人 IMEC;GLOBALFOUNDERIES INC.;GLOBALFOUNDERIES INC.;IMEC 发明人 BAKLANOV MIKHAIL;IACOPI FRANCESCA;VANHAELEMEERSCH SERGE
分类号 H01B19/04 主分类号 H01B19/04
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