SYSTEM AND METHOD OF DETECTING END-POINT THROUGH MONITORING A LIGHT IN A CLEANING PROCESS

摘要

PURPOSE: A system and method for detecting a cleaning end point are provided to reduce time waste by applying accurate cleaning time. CONSTITUTION: A sensing unit(106) is connected to the outside of a chamber and senses light for a cleaning process. A detecting unit(108) is connected to the sensing unit and selects peak values related to byproducts and cleaning gases. The detecting unit detects a cleaning end point. [Reference numerals] (106) Sensing unit; (108) Detecting unit; (AA) Cleaning gas; (BB) Byproduct