| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical scanning device and an optical scanning control device for reducing the noise of sensor wiring, and for highly accurately detecting the inclination of a mirror. <P>SOLUTION: The optical scanning device includes: a pair of first drive beams between which a mirror and a mirror support part are sandwiched; a connection beam for connecting one side of the first drive beams to a twist beam; and a first piezoelectric sensor formed on the connection beam for, when a drive voltage is applied to the first drive beams, and the mirror oscillates, detecting the displacement of the connection beam due to the oscillation of the twist beam around an axis. The first piezoelectric sensor means is configured such that upper electrode wiring is drawn toward one of the first drive beams between which the mirror and the mirror support part are sandwiched, and that lower electrode wiring is drawn toward the other of the first drive beams between which the mirror and the mirror support part are sandwiched. <P>COPYRIGHT: (C)2013,JPO&INPIT |
