| 摘要 |
<P>PROBLEM TO BE SOLVED: To inhibit loop oscillation in an odd mode without using an epitaxial resistance and a resistor chip. <P>SOLUTION: A semiconductor device manufacturing method comprises: a step of forming a metal layer 60; and a step of patterning the metal layer 60 by using as a mask, a plating layer 64 having a pattern excluding a part of a pattern of a gate bus line 26 to which gate fingers 14 of a plurality of FETs are commonly connected, and a second mask layer 66 covering the part of region to form a gate bus line 26. <P>COPYRIGHT: (C)2013,JPO&INPIT |
