| 摘要 |
<P>PROBLEM TO BE SOLVED: To make the quality of a substrate to be processed uniform by making an electrode less likely to shrink. <P>SOLUTION: The substrate processing apparatus includes a processing chamber for housing substrates, a gas supply unit for supplying process gas into the processing chamber, a pair of electrodes to which a high frequency power is applied in order to bring the process gas into active state, and a housing tube for housing the pair of electrodes, respectively, in a state where they are bent in at least one place. The electrode has a core wire composed of a metal, a plurality of tube bodies coupled by the core wire so as to be foldable, and a braided member composed of a metal and provided to cover the plurality of tube bodies. <P>COPYRIGHT: (C)2013,JPO&INPIT |
