发明名称 |
INKJET APPLICATION DEVICE AND INKJET APPLICATION METHOD |
摘要 |
<p>[Problem] To minimize unevenness in the drying of ink applied to a substrate. [Solution] The inkjet application device in one embodiment of the present invention is provided with an ink head module (12) that has a first head group (12A) and a second head group (12B). Partitioning the entire surface of a substrate (S) into a plurality of regions (R1 to R6) along an X-axis, the first head group (12A) applies ink droplets to a prescribed first set of regions (R1, R3, R5). The second head group (12B) is offset a prescribed distance (H) along a Y-axis from the first head group (12A) and applies ink droplets to the remaining regions, namely a second set of regions (R2, R4, R6). The movement of a stage (11) that supports the substrate (S) is controlled such that the droplets from the second head group (12B) land on the substrate (S) within a prescribed amount of time from when the droplets from the first head group (12A) land on the substrate.</p> |
申请公布号 |
WO2013069256(A1) |
申请公布日期 |
2013.05.16 |
申请号 |
WO2012JP07096 |
申请日期 |
2012.11.06 |
申请人 |
ULVAC, INC.;SUMITOMO CHEMICAL COMPANY, LIMITED |
发明人 |
IGUCHI, SHINSUKE;IKEMOTO, SADANOBU;AMAMIYA, SATOSHI |
分类号 |
H05B33/10;B05C5/00;B05D1/26;H01L51/50 |
主分类号 |
H05B33/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|