发明名称 INKJET APPLICATION DEVICE AND INKJET APPLICATION METHOD
摘要 <p>[Problem] To minimize unevenness in the drying of ink applied to a substrate. [Solution] The inkjet application device in one embodiment of the present invention is provided with an ink head module (12) that has a first head group (12A) and a second head group (12B). Partitioning the entire surface of a substrate (S) into a plurality of regions (R1 to R6) along an X-axis, the first head group (12A) applies ink droplets to a prescribed first set of regions (R1, R3, R5). The second head group (12B) is offset a prescribed distance (H) along a Y-axis from the first head group (12A) and applies ink droplets to the remaining regions, namely a second set of regions (R2, R4, R6). The movement of a stage (11) that supports the substrate (S) is controlled such that the droplets from the second head group (12B) land on the substrate (S) within a prescribed amount of time from when the droplets from the first head group (12A) land on the substrate.</p>
申请公布号 WO2013069256(A1) 申请公布日期 2013.05.16
申请号 WO2012JP07096 申请日期 2012.11.06
申请人 ULVAC, INC.;SUMITOMO CHEMICAL COMPANY, LIMITED 发明人 IGUCHI, SHINSUKE;IKEMOTO, SADANOBU;AMAMIYA, SATOSHI
分类号 H05B33/10;B05C5/00;B05D1/26;H01L51/50 主分类号 H05B33/10
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