SYSTEM AND METHOD FOR INSPECTING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a system and a method for inspecting a substrate.

SOLUTION: A system for inspecting a substrate according to one embodiment of the present invention includes: a first inspection table on which a substrate is placed; a second inspection table on which the substrate placed on the first inspection table is placed again; first image taking means for taking an image of the substrate placed on the first inspection table; second image taking means for taking an image of an area corresponding to a position where a failure is suspected, in the substrate placed again on the second table; and a control unit that detects the position where a failure is suspected from the substrate image taken by the first image taking means and calculates coordinate data for the detected position where a failure is suspected to transmit the data to the second image taking means.

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