| 摘要 |
A spatial three-dimensional (3D) inline handling system comprises: a ceiling with guide rails; a plurality of cassettes disposed at a bottom surface of the ceiling to temporarily store substrates; a plurality of processing units disposed below the cassettes to process the substrates; and an overhead handling apparatus for handling the substrates between the cassettes and the processing units and slidably connected with the guide rails. In the present disclosure, the ground space occupied by the handling system is reduced by adopting a 3D handling manner and disposing robot arms at overhead positions, and the space utilization factor is greatly increased by disposing the processing units of the substrate processing line concentratively. Meanwhile, the robot arms handles the substrates overhead to improve the handling efficiency; furthermore, because the overhead handling apparatus is located near the FFUs, cleanliness of the substrates is increased and, consequently, the product yield is increased.
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