发明名称 Semiconductor Magnetoresistive Random-access Memory (MRAM) Device and Manufacturing Method thereof
摘要 The present disclosure describes a semiconductor MRAM device and a manufacturing method. The device reduces magnetic field induction "interference" (disturbance) phenomenon between adjacent magnetic tunnel junctions when data is written and read. This semiconductor MRAM device comprises a magnetic tunnel junction unit and a magnetic shielding material layer covering the sidewalls of the magnetic tunnel junction unit. The method for manufacturing a semiconductor device comprises: forming a magnetic tunnel junction unit, depositing an isolation dielectric layer to cover the top and the sidewall of the magnetic tunnel junction unit, and depositing a magnetic shielding material layer on the isolation dielectric layer.
申请公布号 US2013119496(A1) 申请公布日期 2013.05.16
申请号 US201213654321 申请日期 2012.10.17
申请人 SEMICONDUCTOR MANUFACTURING INTERNA;SEMICONDUCTOR MANUFACTURING INTERNA;SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORPORATION (BEIJING);SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORPORATION (SHANGHAI) 发明人 ZENG GAVIN
分类号 H01L43/02;H01L43/12 主分类号 H01L43/02
代理机构 代理人
主权项
地址