| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sliding component on which a film that has low friction performance equivalent to an existing amorphous carbon film such as a diamond-like carbon (DLC) and wear resistance superior to that of an existing amorphous carbon film when being used under a no lubrication or boundary lubrication environment, is formed. <P>SOLUTION: The sliding component is used under the no lubrication or boundary lubrication environment, and an amorphous hard film is formed at a sliding surface of a substrate constituting the sliding component. The amorphous hard film contains at least boron, carbon, nitrogen and oxygen, wherein, when the total of the boron, the carbon, the nitrogen and the oxygen is 100 atom%, the content of the carbon is 12 atom% or more, the content of the nitrogen is 10 atom% or more, the content of the boron is greater than each content of the carbon and the nitrogen, and the content of the oxygen is 5-12 atom%, and the thickness of the amorphous hard film is 0.08-10 μm. <P>COPYRIGHT: (C)2013,JPO&INPIT |
