| 发明名称 |
APPARATUS FOR CRYSTALLIZATION |
| 摘要 |
<p>PURPOSE: A crystallizing apparatus is provided to improve the crystallization efficiency of amorphous silicon by efficiently crystallizing uniform crystals without damaging a substrate. CONSTITUTION: A stage has a substrate. The substrate includes an amorphous silicon layer. A flash lamp(100) is located on the upper side of the substrate and emits light to the amorphous silicon layer. The flash lamp crystallizes the amorphous silicon layer.</p> |
| 申请公布号 |
KR20130050760(A) |
申请公布日期 |
2013.05.16 |
| 申请号 |
KR20110115989 |
申请日期 |
2011.11.08 |
| 申请人 |
LIGADP CO., LTD. |
发明人 |
YOUN, JONG WEON;KIM, GYEONG HOON |
| 分类号 |
H01L21/268;G02F1/13;H01L21/20;H01L29/786 |
主分类号 |
H01L21/268 |
| 代理机构 |
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