| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid ejection head and a liquid ejecting apparatus capable of reliably preventing destruction of a piezoelectric element over a long period of time, and to provide the piezoelectric element and a method of manufacturing the same. <P>SOLUTION: The liquid ejection head includes a pressure generating chamber 12 communicating with a nozzle opening 21, and the piezoelectric element 300 with a piezoelectric layer 70 and an electrode provided in the piezoelectric layer. The piezoelectric element is covered with a protective film 100 containing an aluminum oxide film formed by an ALCVD method. <P>COPYRIGHT: (C)2013,JPO&INPIT |
