| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laminar workpiece conveyance device and method which can stably convey a laminar workpiece at high speed without being affected by warpage of the laminar workpiece even if the laminar workpiece is further thinned. <P>SOLUTION: The laminar workpiece conveyance device includes: an air floating unit 2 which supports a glass substrate W in a contactless state by blowing air on the lower surface of the glass substrate; a conveyance roller 37 which applies a moving force in workpiece conveyance direction in contact with the lower surface of the glass substrate W; and a sucking means 4 for attracting a contacting section Wt of the glass substrate W with the conveyance roller 37 toward the side of the conveyance roller 37. Moreover, the laminar workpiece conveyance device includes an air pressing unit 5 which presses the glass substrate W onto the conveyance roller 37 by spewing air toward the upper surface of the glass substrate W. <P>COPYRIGHT: (C)2013,JPO&INPIT |
