发明名称 LAYERS COMPOSITE COMPRISING A PYROGENIC ZINC OXIDE LAYER AND FIELD-EFFECT TRANSISTOR COMPRISING THIS COMPOSITE
摘要 Composite of layers which comprises a dielectric layer and a layer which comprises pyrogenic zinc oxide and is bonded to the dielectric layer. Process for producing the composite of layers, in which the pyrogenic zinc oxide is applied to the dielectric layer in the form of a dispersion in which the zinc oxide particles are present with a mean aggregate diameter of less than 200 nm, and the zinc oxide layer is dried and then treated at temperatures of less than 200° C. Process for producing the composite of layers, in which the pyrogenic zinc oxide is applied to a substrate layer or a composite of substrate layers in the form of a dispersion in which the zinc oxide particles are present with a mean aggregate diameter of less than 200 nm to form a zinc oxide layer, and then the zinc oxide layer and the substrate layer are treated at temperatures of less than 200° C., and then a dielectric layer is applied to the zinc oxide layer. Field-effect transistor which has the composite of layers.
申请公布号 HK1139789(A1) 申请公布日期 2013.05.16
申请号 HK20100106284 申请日期 2010.06.25
申请人 EVONIK DEGUSSA GMBH;FORSCHUNGSZENTRUM KARLSRUHE GMBH 发明人 FRANK-MARTIN PETRAT F-;HEIKO THIEM;SVEN HILL;ANDRE EBBERS;KOSHI OKAMURA;ROLAND SCHMECHEL
分类号 C01G;H01L 主分类号 C01G
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