| 摘要 |
A substrate handling robot drive comprising a drive chassis for one or more robot arms. A first housing is movable with respect to the chassis and includes at least a first shaft and a first motor subsystem driving the first shaft. A Z-axis drives the first housing. A second housing is movable with respect to the chassis includes at least a second shaft and a second motor subsystem driving the second shaft. A Z-axis drive for the second housing is independently movable with respect to the Z-axis drive for the first housing.
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