| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a three-dimensional surface inspection device which allows a three-dimensional defect such as a recess and a large flaw on the surface to be accurately and rapidly inspected with a simple structure at low cost, even in the case of having acute mirror reflection from a measurement object. <P>SOLUTION: A three-dimensional surface inspection device includes a camera device 3 which takes a picture of a measurement object X, a filter membrane which is arranged in a curve form so as to cover the measurement object, curve pattern light projection means 5 which projects pattern light having a curved intensity distribution with a periodic intensity distribution along the curve form of the filter membrane to the measurement object through the filter membrane, and defect detection means 13 which detects a three-dimensional defect in the surface of the measurement object through a decoding process to convert the curved intensity distribution to a linear intensity distribution for the picture taken by the camera device 3. <P>COPYRIGHT: (C)2013,JPO&INPIT |
