发明名称 METHODS FOR PROCESSING HOLES BY MOVING PRECISELY TIMED LASER PULSES IN CIRCULAR AND SPIRAL TRAJECTORIES
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for starting and ending circular drill motions by acceleration of a specifiable beam positioner. <P>SOLUTION: High speed removal of material from a specimen employs a beam positioner for directing a laser beam axis along various circular 50 and spiral laser tool patterns. A preferred method for removing the material includes: causing relative movement between the beam axis and the specimen; directing the beam axis at an entry segment acceleration and along an entry trajectory 52 to an entry position 54 within the specimen at which laser beam pulse emissions 58 are initiated; moving the beam axis at a circular perimeter acceleration within the specimen to remove the material along a circular segment of the specimen; and setting the entry segment acceleration to less than twice the circular perimeter acceleration. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013091102(A) 申请公布日期 2013.05.16
申请号 JP20120247224 申请日期 2012.11.09
申请人 ELECTRO SCIENTIFIC INDUSTRIES INC 发明人
分类号 B23K26/38;B23K26/00;B23K26/04 主分类号 B23K26/38
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