| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pattern forming mold requiring a short processing time, and having a long lifetime as a tool and high image formation quality, and to provide a method for manufacturing the same. <P>SOLUTION: This pattern forming mold, which is a pattern forming mold for transferring a pattern having recesses and protrusions onto the surface of a material to be processed, is constituted by a substrate 1, and a DLC pattern layer 4b bonded to the substrate 1 through intermediate layers 2, 3, wherein the substrate 1 is a rigid metal, ceramics or glass, and the intermediate layers 2, 3, which are layers having a smaller etching rate in comparison with the DLC pattern layer 4b, provide bondability with the substrate 1 and the DLC pattern layer 4b, and a pattern to be transferred onto the surface of the material to be processed is formed on the DLC pattern layer 4b. <P>COPYRIGHT: (C)2013,JPO&INPIT |
