发明名称 BLADE COVER DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a blade cover device that facilitates definition and confirmation of the position of a nozzle and secures the reproducibility thereof. <P>SOLUTION: The blade cover device that covers a cutting blade mounted to the tip of a spindle, includes a base part that is fixed to the spindle, and a nozzle mechanism that is arranged opposite to the outer circumferential end surface of the cutting blade, mounted to the base part and includes a nozzle for supplying a cutting fluid to the cutting blade, and is mounted to the base part. The nozzle mechanism includes a nozzle assembly that is mounted to the body part and is provided with the nozzle, a position adjustment means that allows the nozzle to vary the position in the axial direction of the spindle relative to the base part, and a position display means that displays the position of the nozzle in the axial direction of the spindle and is made of a scale and a display mark. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013091119(A) 申请公布日期 2013.05.16
申请号 JP20110233182 申请日期 2011.10.24
申请人 DISCO CORP 发明人 MAEMOKU YOSHIO
分类号 B23Q11/10;H01L21/301 主分类号 B23Q11/10
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