发明名称 SUBSTRATE LAMINATION DEVICE AND SUBSTRATE LAMINATION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an oscillating body restraining mechanism which does not produce reactive force to another axis. <P>SOLUTION: An oscillating body restraining mechanism restrains movement of an oscillating body 113 which moves along a spherical surface seat 111. The oscillating body restraining mechanism comprises; a cut surface 119 with a shape of a cylindrical surface formed on the oscillating body 113; and a pushing member 115 having a leading end with a shape of a spherical surface and coming into contact with the cut surface 119. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013093605(A) 申请公布日期 2013.05.16
申请号 JP20120288360 申请日期 2012.12.28
申请人 NIKON CORP 发明人 YOSHIHASHI MASAHIRO
分类号 H01L21/02 主分类号 H01L21/02
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