| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an echelle diffraction grating capable of maintaining a diffraction efficiency over long term use. <P>SOLUTION: An excimer laser having a reflection-type echelle diffraction grating is manufactured through the step of obtaining information on a wavelength, a blaze order, a repeating pitch, a material of the grating, and an orientation ratio b/a which is a ratio of a diffraction efficiency a of a blaze order satisfying 0.025≤b/a≤0.4 and a diffraction efficiency b one-order lower than the diffraction efficiency a; and the step of determining an initial value of a blaze angle referring to the information. <P>COPYRIGHT: (C)2013,JPO&INPIT |
