| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multi-wavelength interferometer which does not deteriorate measurement accuracy even if a measurement surface is inclined. <P>SOLUTION: An interferometer splits at least two light fluxes having different wavelengths into a reference beam and a measurement beam, makes the frequencies of the split reference beam and the split measurement beam different from each other, and causes the reference beam and the measurement beam to interfere with each other. The interferometer includes a dividing unit configured to divide the interference light into a plurality of light fluxes, for detecting the plurality of light beams divided for each wavelength. <P>COPYRIGHT: (C)2013,JPO&INPIT |
