| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical modulation control method which can excellently perform focusing control of a laser beam with a satisfactory degree of freedom, and provide a control program, a control apparatus and a laser beam irradiation apparatus. <P>SOLUTION: Control of laser beam focused irradiation with a spatial light modulator includes the steps of: obtaining the number of wavelength of a laser beam, each wavelength value, and an incidence condition of the laser beam (step S101); setting the number of focusing points, a focusing position at each focusing point, wavelength and focusing intensity (step S104); setting a focusing control pattern applied to the laser beam at each focusing point (step S107); and designing a modulation pattern applied to the spatial light modulator in consideration of the focusing control pattern (step S108). The design of the modulation pattern uses a design method which focus attention on influences of a phase value in one pixel, and further uses a propagation function to which a phase pattern opposite of the focusing control pattern is added in evaluation of a focusing state of the focusing point. <P>COPYRIGHT: (C)2013,JPO&INPIT |
