发明名称 |
GAS FIELD ION SOURCE AND METHOD FOR USING SAME, ION BEAM DEVICE, AND EMITTER TIP AND METHOD FOR MANUFACTURING SAME |
摘要 |
To provide a gas field ion source having a high angular current density, the gas field ion source is configured such that at least a base body of an emitter tip configuring the gas field ion source is a single crystal metal, such that the apex of the emitter tip is formed into a pyramid shape or a cone shape having a single atom at the top, and such that the extraction voltage in the case of ionizing helium gas by the single atom is set to 10 kV or more. |
申请公布号 |
US2013119252(A1) |
申请公布日期 |
2013.05.16 |
申请号 |
US201113811392 |
申请日期 |
2011.07.13 |
申请人 |
KAWANAMI YOSHIMI;MATSUBARA SHINICHI;MORITANI HIRONORI;ARAI NORIAKI;SHICHI HIROYASU;HASHIZUME TOMIHIRO;KAGA HIROYASU;SAHO NORIHIDE;MUTO HIROYUKI;OSE YOICHI |
发明人 |
KAWANAMI YOSHIMI;MATSUBARA SHINICHI;MORITANI HIRONORI;ARAI NORIAKI;SHICHI HIROYASU;HASHIZUME TOMIHIRO;KAGA HIROYASU;SAHO NORIHIDE;MUTO HIROYUKI;OSE YOICHI |
分类号 |
H01J37/26;B23K9/00;H01J1/304 |
主分类号 |
H01J37/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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