| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrolytic apparatus that reduces a frequency of maintenance and prevents malfunction from occurring. <P>SOLUTION: The electrolytic apparatus 10 includes an electrolytic tank 11. The electrolytic tank 11 houses an electrolytic bath 12 containing hydrogen fluoride (HF). The HF in the form of gas is supplied from a supply port 18d of an HF supply pipe 18a to a space SP formed above the electrolytic bath 12 in the electrolytic tank 11. When the HF is supplied from the HF supply pipe 18a, a pressure in the space SP in the electrolytic tank 11 is controlled to be higher than a steam pressure of the HF by a control part 23. <P>COPYRIGHT: (C)2013,JPO&INPIT |
