ION BEAM DEPOSITION OF FLUORINE-BASED OPTICAL FILMS

摘要

The presently disclosed technology uses dissociated fluorine (120) and one or both of hydrogen and oxygen (122) to assist the deposition of metal-fluoride thin films having low optical losses using ion sputter deposition. The dissociated fluorine and one or both of hydrogen and oxygen are injected into an enclosure (116) within which the sputter deposition operations occur. The dissociated fluorine and one or both of hydrogen and oxygen assist the sputtering of metal-fluoride material from a target (104) and/or deposition of the sputtered metal-fluoride material (110) on one or more substrates (106).