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发明名称
COOLED CHARGED PARTICLE SYSTEMS AND METHODS
摘要
申请公布号
EP2443644(B8)
申请公布日期
2013.05.15
申请号
EP20100742622
申请日期
2010.06.14
申请人
CARL ZEISS MICROSCOPY, LLC
发明人
COMMUNALE, RICHARD;BARRISS, LOUISE;MCVEY, SHAWN;DIMANNA, MARK D.;GROHOLSKI, ALEXANDER;SANFORD, COLIN A.;BASSETT, BRIAN M.;NOTTE IV, JOHN A.
分类号
H01J37/08;H01J37/02;H01J37/28
主分类号
H01J37/08
代理机构
代理人
主权项
地址
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