发明名称 |
MANUFACTURING METHOD FOR CHANNEL PLATE, CHANNEL PLATE, TEMPERATURE ADJUSTMENT PLATE, COLD PLATE, AND SHOWER PLATE |
摘要 |
<p>A plate with a passage and the like capable of shortening a process time than a previous one and of suppressing leakage from or contamination to the passage are provided. The plate with the passage is a plate in which the passage for causing a fluid to circulate therein is formed, and includes a body plate formed of a metal or an alloy and in which a groove serving as the passage is provided, a cover plate that covers the groove, and a deposition layer that is formed such that metal or alloy powder is accelerated with a gas and is sprayed on the body plate and the cover plate in a solid phase, and covers the cover plate.</p> |
申请公布号 |
EP2592647(A1) |
申请公布日期 |
2013.05.15 |
申请号 |
EP20110803639 |
申请日期 |
2011.07.06 |
申请人 |
NHK SPRING CO., LTD. |
发明人 |
HANAMACHI, TOSHIHIKO |
分类号 |
H01L21/683;C23C16/455;C23C16/458;C23C24/02;F28F3/12;H01L21/205 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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