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发明名称
MAGNETRON SPUTTERING APPARATUS AND SPUTTERING METHOD
摘要
<p>마그네트론 스퍼터링 장치의 자석 유닛은, 내측 자석과, 외측 자석과, 그들을 고정하는 비자성체와, 내측 자석과 외측 자석의 자극을 접속하는 요크를 갖는다. 요크는 판상의 형상을 가지며, 직사각 형상으로 배열된 외측 자석의 긴 변 방향에 직교하는 면으로 복수 개로 분할되고, 또한 분할된 각각의 요크는 교환 가능하다.</p>
申请公布号
KR101264991(B1)
申请公布日期
2013.05.15
申请号
KR20110026222
申请日期
2011.03.24
申请人
发明人
分类号
C23C14/35;C23C14/54
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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