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发明名称
摘要
申请公布号
JP5198754(B2)
申请公布日期
2013.05.15
申请号
JP20060295050
申请日期
2006.10.31
申请人
发明人
分类号
H01L29/82;H01L21/336;H01L27/10;H01L29/66;H01L29/78;H01L43/08
主分类号
H01L29/82
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