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发明名称
GATE VALVE FOR A VACUUM CHAMBER AND VACUUM CHAMBER
摘要
申请公布号
EP2220412(B1)
申请公布日期
2013.05.15
申请号
EP20080864682
申请日期
2008.12.19
申请人
TEL SOLAR AG
发明人
WAGNER, PHILIPP;MEIER, ANDREAS;EGLI, CHRISTIAN
分类号
F16K3/18;F16K51/02
主分类号
F16K3/18
代理机构
代理人
主权项
地址
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