Chemical mechanical planarization processes for fabrication of finfet devices,申请号GB20130005905-传众专利搜索

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发明名称	Chemical mechanical planarization processes for fabrication of finfet devices
摘要
申请公布号	GB201305905(D0)	申请公布日期	2013.05.15
申请号	GB20130005905	申请日期	2011.10.03
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION;JSR CORPORATION	发明人
分类号		主分类号
代理机构		代理人
主权项
地址

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