发明名称 Method for forming strained layer with high Ge content on substrate and semiconductor structure
摘要 A semiconductor structure and a method for forming the same are provided. The semiconductor structure may comprise a substrate (110); an insulation layer (120) formed on the substrate (110); a strained layer (130) formed on the insulation layer (120); a strained layer (140) with high Ge content formed on the strained layer (130); and a gate stack (160) formed on the strained layer (140) with high Ge content.
申请公布号 US8440550(B2) 申请公布日期 2013.05.14
申请号 US201013126730 申请日期 2010.11.29
申请人 WANG JING;XU JUN;GUO LEI;TSINGHUA UNIVERSITY 发明人 WANG JING;XU JUN;GUO LEI
分类号 H01L29/78;H01L21/20;H01L21/265 主分类号 H01L29/78
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