3-DIMENSIONAL CONFOCAL ELECTROLUMINESCENCE SPECTRAL-MICROSCOPE APPARATUS

摘要

PURPOSE: A 3D confocal electroluminescence spectral microscope device is provided to obtain the brightness of electroluminescence images evenly, thereby improving a spectroscopy interpretation capacity. CONSTITUTION: A 3D confocal electroluminescence spectral microscope device comprises a support unit(110), a spectroscopic analysis unit(140), a confocal lens unit(120), and an optical fiber connecting unit(130). A light emitting element is mounted on the support. The spectroscopic analysis unit provides a current to the light emitting element and splits lights. The confocal lens unit receives the light emitted by the light emitting unit by the current supply. The optical fiber connecting unit detects the light having a focus same with the focus formed on the surface of the light emitting element by the confocal lens unit, thereby providing the detected lights to the spectroscopic analysis unit. The spectroscopic analysis unit performs optical scanning using a piezo nano positioner and forms 3D electroluminescence images based on the result of the optical scanning. [Reference numerals] (AA) Object; (BB) SMA connector; (CC) PMT detector; (DD) Monochromator; (EE) CCD detector; (FF) Control module; (GG) Source meter; (HH) Controller of an X-Y-Z piezo nano positioner