| 发明名称 |
Diruthenium complex, and material and method for chemical vapor deposition |
| 摘要 |
A diruthenium complex such as tetra(mu-formato)diruthenium(II,II) or tetra(mu-formato)(dehydrate)diruthenium(II,II), a material for chemical vapor deposition which comprises the complex, and a method of forming a ruthenium film from the material by chemical vapor deposition. |
| 申请公布号 |
US8440260(B2) |
申请公布日期 |
2013.05.14 |
| 申请号 |
US20080933127 |
申请日期 |
2008.09.04 |
| 申请人 |
SAKAI TATSUYA;KOMIYA SANSHIRO;NOMURA NAOFUMI;JSR CORPORATION |
发明人 |
SAKAI TATSUYA;KOMIYA SANSHIRO;NOMURA NAOFUMI |
| 分类号 |
C23C16/00;C07F15/00 |
主分类号 |
C23C16/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
