| 摘要 |
A method of measuring a shape of a specular reflective surface is provided. A pattern displayed on a surface of a target positioned at a target plane is produced from a specular reflective surface positioned at a measurement plane. An image of the reflection is recorded at an imaging plane. Positions of a plurality of points on the specular reflective surface relative to the imaging plane are determined. A first relation between feature positions on the image of the reflection and feature positions on the pattern is determined. The shape of the specular reflective surface is determined from a second relation involving a surface profile of the specular reflective surface and the first relation using the positions of the plurality of points as an initial condition. |
