| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum dryer that suppresses occurrence of non-uniform drying and forms a satisfactory residual film by suppressing variation in dried state of a coating film and by uniformly drying the coating film by correcting the temperature of a substrate on an area basis even when there occurs variation in air flow direction within a chamber and variation in flow rate. <P>SOLUTION: A vacuum dryer comprises: a chamber 9 that stores a processing target substrate and forms a processing space; a holding section 11 to hold the processing target substrate; a lifting means 25 to move up and down the holding section; an air inlet 16 formed in the chamber; a supply means 18 that supplies inert gas from the air inlet into the processing space in the chamber; an air outlet 13 formed in the chamber; an air exhaust means 14 that exhausts the atmosphere in the chamber from the air outlet; a first heat treatment section 20 disposed above the processing target substrate and divided into a plurality of areas; and a first control section 41 to perform temperature control for each of the areas of the first heat treatment section. <P>COPYRIGHT: (C)2013,JPO&INPIT |
