| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical quantity sensor for generating a reference clock signal with high accuracy and always detecting distortion and loading working on an object in a stable state by making a sensor compact. <P>SOLUTION: The physical quantity sensor of this invention includes a first vibrator including a beam-shaped vibrating body 23 formed on the surface of a semiconductor substrate 21 to change a string vibration frequency due to the action of dynamic quantity working on the semiconductor substrate 21, and a second vibrator 31 for a clock signal generation at a position where a vibration frequency does not change due to the action of the dynamic quantity working on the semiconductor substrate 21. <P>COPYRIGHT: (C)2013,JPO&INPIT |
