| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical filter and an optical filter module for precisely obtaining a gap amount, an analytical instrument and an optical apparatus. <P>SOLUTION: An optical filter 10 has a first substrate 20, a second substrate 30, a first reflecting film 40 provided on the first substrate, a second reflecting film 50 provided on the second substrate, first and second electrodes 62 and 64 provided on the first substrate at positions around the first reflecting film in plan view and third and fourth electrodes 72 and 74 which are provided on the second substrate and opposed to the first and second electrodes. The second electrode 64 has a first slit, and first wiring connected to the first electrode is extended to an outer peripheral region of the first substrate through a region in which the first slit is formed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
