| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optimum supply device capable of remarkably reducing consumption of liquid nitrogen in a supply device of cold gas. <P>SOLUTION: A supply device 1 of the present invention includes at least one additional exchangers 8, 8', 8'' for preliminarily cooling a gas stream before sending the gas stream to corresponding exchangers 6, 6', 6'', the additional exchanger or the respective additional exchangers 8, 8', 8'' present the form of double tube type exchangers, and are supplied with gaseous vapor 5' generated by boiling of liquid gas 5 inside a reservoir 4, or the cold gas that is discharged to the outside of a probe or leaks out at the position of the probe. <P>COPYRIGHT: (C)2013,JPO&INPIT |
