| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus for peeling off a film and a method for peeling off a film, capable of preventing minute debris or the like from being generated upon peeling off an end part of a protective film adhering to a board such as a substrate to prevent damage of a board such as a substrate and to prevent a trouble from occurring in the apparatus. <P>SOLUTION: The apparatus of peeling off a film, including an edge peeling mechanism of peeling off the edge of a protective film B adhering onto one or either side of a substrate A with the protective film from the substrate A, and a main peeling mechanism of gradually peeling off the whole of the protective film from the edge thereof having been peeled off as a trigger point, with the main peeling mechanism disposed downstream of the edge peeling mechanism in the board transfer direction, is characterized in that the edge peeling mechanism includes a partial peeling means that causes a part of the edge of the protective film to rise from the substrate A, a gas ejection unit 17 comprising a nozzle 25 with its ejection port directed to the front edge of the substrate A in the board transfer direction, and a gas ejection unit moving means 18 of moving the gas ejection unit 17 in the width direction of the board. <P>COPYRIGHT: (C)2013,JPO&INPIT |
