CHEMICAL SENSOR, CHEMICAL SENSOR MODULE, BIOMOLECULE DETECTION DEVICE, AND BIOMOLECULE DETECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a chemical sensor, a chemical sensor module, a biomolecule detection device, and a biomolecule detection method that enable biomolecules to be detected with high precision.

SOLUTION: A chemical sensor of the present invention comprises a substrate, an on-chip lens, and a planarization layer. The substrate has a plurality of photodiodes formed thereon and arranged in a flat shape. The on-chip lens is provided on the substrate and condenses incident light on the photodiodes. The planarization layer covers and planarizes the on-chip lens and forms a probe support surface for supporting a probe material.

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