| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma gun in which an auxiliary negative electrode and a main negative electrode can be easily maintained. <P>SOLUTION: An opening edge on one end of a cylindrical container 17 is fixed to an intermediate electrode 1b, and a tapered flange part 46 is formed at an opening edge on the other end. A cylindrical protective member 15 attachably/detachably mounted to a negative electrode mounting substrate 11 is disposed inside the cylindrical container 17, and an auxiliary negative electrode 14 and a main negative electrode 16 detachably/attachably mounted to the negative electrode mounting substrate 11 and the protective member 15 are disposed inside the protective member 15. A tapered flange part 48 of the negative electrode mounting substrate 11 is symmetrically abutted to the tapered flange part 46 of the cylindrical container 17 via a seal member 47, and a recess groove 62 of fixing means 61 is fitted across the tapered flange parts 46 and 48 from an outer peripheral side. The fixing means 61 can couple plural blocks 63 by a link 64 in a chain-like manner, and fasten the blocks positioned at one end and the other end of an annular body coupled in a chain-like manner by one spring-type operation rod in an approaching direction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
